[19p-C1-1~17] 8.1 Plasma production and control

△ [19p-C1-9] Development of negative oxygen plasma source applied to produce pure ZnO at room temperature

^○Masayoshi Yamamoto¹, Haruhiko Himura¹, Shigefumi Okada², Akio Sanpei¹, Sadao Masamune¹ (Kyoto Institute of Technology¹, Osaka Univ.²)

Keywords:酸素負イオン　,ZnO,室温