[19p-C11-1~19] 9.5 New functional materials and new physical properties

△ [19p-C11-1] Effect of the ultrasonic strain of the electrical conductivity in Si wafer

^○Kazuki Tsuruta¹, Masaki Mito¹, Takuma Nagano¹, Yuki Katamune², Tsuyoshi Yoshitake² (Kyushu Inst. of Tech.¹, Kyushu Univ.²)

Keywords:ひずみ,超音波,シリコン