[19p-C14-1~11] 3.8 Frontier of optics

[19p-C14-10] Silicon-twisted-bump formation by using optical vortex

^○Fuyuto Takahashi¹, Shun Takizawa¹, Katsuhiko Miyamoto¹, Ryuji Morita^2,3, Takashige Omatsu^1,3 (Chiba Univ¹, Hokkaido Univ², JST-CREST³)

Keywords:光渦,シリコン,レーザーアブレーション