1:30 PM - 1:45 PM
△ [19p-C2-1] Estimation of Electron Collision Cross Sections in SiF4
Keywords:SiF4,Electron swarm method,Monte Carlo simulation
Presentation information
Oral presentation
08. Plasma Electronics » 8.6 General plasma phenomena, emerging area of plasmas and their new applications
[19p-C2-1~20] 8.6 General plasma phenomena, emerging area of plasmas and their new applications
Thu. Sep 19, 2013 1:30 PM - 6:45 PM C2 (TC3 1F-102)