Study of sputter-deposition method for the deposition of upper electrode films in OLED

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

Thu. Sep 19, 2013 2:00 PM - 5:30 PM C7 (TC3 1F-117)

2:00 PM - 2:15 PM

^○Yoichi Hoshi¹, Shin-cihi Kobayashi¹, Takayuki Uchida¹, Hidehiko Shimizu² (Tokyo Polytechinc Univ.¹, Niigata Univ.²)

Keywords:スパッタ堆積,電極膜,OLED