[19p-C7-1~13] 6.4 New thin-film materials

[19p-C7-13] Synthesis of yttria films using flame deposition method with cooling system for substrate

^○Ayumu Toyama¹, Atsushi Nakamura^1,2, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹, Chubu Chelest Co., Ltd.²)

Keywords:イットリア,フレームデポジション法,基板冷却機構