The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-C7-1~13] 6.4 New thin-film materials

Thu. Sep 19, 2013 2:00 PM - 5:30 PM C7 (TC3 1F-117)

5:15 PM - 5:30 PM

[19p-C7-13] Synthesis of yttria films using flame deposition method with cooling system for substrate

Ayumu Toyama1, Atsushi Nakamura1,2, Shigeo Ohshio1, Keiji Komatsu1, Ikumi Toda1, Hiroyuki Muramatsu1, Hidetoshi Saitoh1 (Nagaoka Univ. Tech.1, Chubu Chelest Co., Ltd.2)

Keywords:イットリア,フレームデポジション法,基板冷却機構