The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-C7-1~13] 6.4 New thin-film materials

Thu. Sep 19, 2013 2:00 PM - 5:30 PM C7 (TC3 1F-117)

2:30 PM - 2:45 PM

[19p-C7-3] Preparation of SnO2 thin films by surface discharge technique under various atmosphere

○Masato Tan1, Syota Kanezashi1, Toshimichi Hanai1, Masahiko Iyoda1, Masayuki Okuya1 (Shizuoka Univ.1)

Keywords:沿面放電,プラズマ,酸化スズ