The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-C7-1~13] 6.4 New thin-film materials

Thu. Sep 19, 2013 2:00 PM - 5:30 PM C7 (TC3 1F-117)

3:45 PM - 4:00 PM

[19p-C7-8] Sputtering of Lanthanum Titanium Oxide for Optical Thin Films

○Ryou Okuda1, Tomoaki Takahashi1, Hiroshi Murotani1 (Tokai Univ.1)

Keywords:光学薄膜,スパッタリング