[19p-D2-1~15] 6.6 Probe microscopy

[19p-D2-13] Non-contact atomic force microscopy observation of etching of Si(111) surfaces by irradiation of atomic hydrogen

^○Tomoaki Miyagi¹, Akira Sasahara¹, Masahiko Tomitori¹, Ryohei Kokawa², Masahiro Ohta², Hirofumi Yamada³, Kei Kobayashi^3,4, Noriaki Oyabu^3,5 (JAIST.¹, Shimadzu Corp.², Dept. of Electronic Sci. &Eng.,Kyoto Univ.³, Hakubi Center, Kyoto Univ.⁴, JST.⁵)

Keywords:原子状水素