[19p-P2-1~19] 9.2 Nanowires, nanoparticles

[19p-P2-6] Segregation behaviors of B and P in codoped silicon nanowires during thermal oxidation

^○Jun Kaminaga^1,2, Ryo Takiguchi², Keitarou Suzuki^1,2, Syunichi Hishita¹, Takashi Sekiguchi¹, Kouichi Murakami², Naoki Fukata^1,2 (NIMS¹, Tsukuba Univ.²)

Keywords:ナノワイヤ,電子共鳴スピン,偏析挙動