[20a-A8-1~12] 5.3 Optical Control

[20a-A8-9] Low-Loss Optical Interlayer Coupler for Three-Dimensional On-Chip Optical Interconnect

^○Ryohei Takei^1,2, Emiko Omoda^1,2, Masao Suzuki^1,2, Shoko Manako^1,2, Toshihiro Kamei^1,2, Masahiko Mori^1,2, Youichi Sakakibara^1,2 (AIST¹, PECST²)

Keywords:シリコンフォトニクス,オンチップ光配線,3次元光回路