The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[20a-B4-1~11] 13.5 Si process technology

Fri. Sep 20, 2013 9:00 AM - 12:00 PM B4 (TC2 1F-106)

10:00 AM - 10:15 AM

[20a-B4-5] Half-Inch Silicon CVD Reactor Using Concentrated Infrared Light Heater

○Ning Li1, Hitoshi Habuka1, Shin-ichi Ikeda2,3, Yuki Ishida2,3, Shiro Hara2,3 (Yokohama Nat. Univ.1, AIST2, Minimal Fab Development Association3)

Keywords:Minimal manufacturing