[20a-C9-1~12] 13.1 Basic properties and their evaluation

△ [20a-C9-12] Observation of LO- and TO-phonon Spectra from High-Ge-Concentration Compressively Strained SiGe Mesa-Structures on a Ge Substrate by Oil-Immersion Raman Spectroscopy

^○Daisuke Kosemura¹, Motohiro Tomita^1,3, Koji Usuda², Tsutomu Tezuka², Atsushi Ogura¹ (Meiji Univ.¹, GNC, AIST², JSPS Research Fellow DC³)

Keywords:SiGe,異方性応力,液浸ラマン