[20a-D3-1~5] 15.7 Fundamentals of epitaxy

[20a-D3-3] [INVITED]Epitaxial growth mechanisms-what we know and what we should know-

^○Tatau Nishinaga¹ (Univ. Tokyo¹)

Keywords:エピタキシャル成長,成長機構、セイチョウキコウ,表面拡散、ヒョウメンカクサン