[Young Scientist Oral Presentation Award Speech](15 min.) Microstructure analysisi of β-FeSi<sub>2</sub> films fabricated on Ag coated Si substrates

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Fri. Sep 20, 2013 9:00 AM - 12:00 PM D6 (MK 3F-301)

9:00 AM - 9:15 AM

^○Shunichi Motomura¹, Kouhei Hayashi¹, Masaru Itakura¹, Kensuke Akiyama² (Kyushu University¹, Kanagawa Industrial Technology Center²)

Keywords:環境半導体,シリサイド