Influence of ozone introduction on electrical characteristics of MIS-structures with ALD-Al<sub>2</sub>O<sub>3</sub>

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

Fri. Sep 20, 2013 9:00 AM - 12:00 PM D7 (MK 3F-302)

9:30 AM - 9:45 AM

^○(M1)Yusuke Yoshida¹, Joseph Freedsman¹, Toshiharu Kubo¹, Takashi Egawa¹ (Nagoya Inst. of Tech.¹)

Keywords:MIS,ALD