[20p-A8-1~8] 5.3 Optical Control

[20p-A8-2] InAs/InAlGaAs Highly-Stacked Quantum Dot Intermixing by ICP-RIE Etching Technique for Low-Loss Optical Waveguides Aimed for Integration with SOA

^○(M2)Asuka Matsushita¹, Atsushi Matsumoto¹, Yuuki Takei¹, Kouichi Akahane², Yuichi Matsushima¹, Katsuyuki Utaka¹ (Waseda Univ.¹, National Inst. of Information and Communications Tech.²)

Keywords:量子ドット,集積化,組成混合