[20p-A8-1~8] 5.3 Optical Control

[20p-A8-4] Study on Si Waveguide-Integrated PIN Ge Photodiode with 50 GHz Bandwidth

^○Masataka Noguchi^1,2, Junichi Fujikata^1,2, Makoto Miura^1,2, Daisuke Okamoto^1,2, Tsuyoshi Horikawa^1,3, Yasuhiko Arakawa^1,4 (PECST¹, PETRA², AIST³, Tokyo Univ.⁴)

Keywords:Siフォトニクス,光集積回路,受光器