[20p-C11-1~7] 9.3 Nanoelectronics

△ [20p-C11-5] In-situ TEM Observation of Au thin wire breaking process caused by electromigration

^○Yosuke Murakami¹, Hayato Ochi¹, Kouichi Hamada¹, Masashi Arita¹, Yasuo Takahashi¹ (IST, Hokkaido Univ.¹)

Keywords:エレクトロマイグレーション,透過型電子顕微鏡,その場観察