[20p-C7-1~5] 6.4 New thin-film materials

△ [20p-C7-3] Epitaxial growth of CoO_xN_y thin film by reactive pulsed-laser deposition

^○Jumpei Takahashi^1,2, Yasushi Hirose^1,2,3, Shouichirou Nakao^2,3, Chang Yang^1,2,3, Souhei Okazaki^2,3, Tomoteru Fukumura^1,2,3, Tetsuya Hasegawa^1,2,3 (Univ. of Tokyo¹, KAST², JST-CREST³)

Keywords:薄膜,PLD