KFM Measurement of Nano-Scale Selectively Doped Silicon Channel

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

Fri. Sep 20, 2013 1:15 PM - 2:30 PM C8 (TC3 2F-201)

1:15 PM - 1:30 PM

^○Krzysztof Tyszka^1,2, Daniel Moraru¹, Takeshi Mizuno¹, Ryszard Jablonski², Michiharu Tabe¹ (Shizuoka Univ.¹, Warsaw Univ. Technol.²)

Keywords:KFM,dopant