[20p-C8-1~5] 13.6 Siデバイス／集積化技術

▲ [20p-C8-1] KFM Measurement of Nano-Scale Selectively Doped Silicon Channel

^○Krzysztof Tyszka^1,2，Daniel Moraru¹，Takeshi Mizuno¹，Ryszard Jablonski²，Michiharu Tabe¹ (Shizudai¹，Warsaw Univ. Technol.²)

キーワード：KFM,dopant