[20p-D6-1~8] 14.1 Physical properties of exploratory materials

△ [20p-D6-1] Electrical property of highly crystalline Mg₂Si films prepared by sputtering method

^○Shota Ogawa¹, Atsuo Katagiri¹, Masaaki Matsushima¹, Kensuke Akiyama^1,2, Yoshisato Kimura¹, Hiroshi Uchida³, Hiroshi Funakubo¹ (Tokyo Inst. of Tech.¹, Kanagawa Inds. Tech. Cent.², Sophia Univ.³)

Keywords:熱電材料,薄膜,スパッタリング法