[28a-A6-1~10] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 9:00 AM - 11:45 AM A6 (K1 3F-305)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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[28a-A6-1] △The modification process of hydrogenated DLC films by the soft X-ray irradiation

^○Ryo Imai¹, Masahito Niibe¹, Kazuhiro Kanda¹ (LASTI, Univ. of Hyogo¹)

[28a-A6-2] Refractive index and extinction coefficient of a-C:H film irradiated with soft X-ray

^○Hisashi Yoshioka¹, Ryo Imai², Kazuhiro Kanda², Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹, Univ. of Hyogo²)

[28a-A6-3] Classification of DLC film and its resistivity

^○Hisashi Yoshioka¹, Shigeo Ohshio¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

[28a-A6-4] Effect on structure of water mixed into deposition process of amorphous carbon film deposited with benzene

^○Xiaolong Zhou¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

[28a-A6-5] Adhesion of diamond-like carbon film in dry by SRV tribotester

^○Tsuguyori Ohana¹, Hiroki Mano¹, Hiroki Ichimura², Takako Nakamura¹ (AIST¹, Tokyo Denki Univ.²)

[28a-A6-5.1] Break(15min)

[28a-A6-6] △Increase in Preparation Rate of Hydrogen-free DLC Film on Bottom of Narrow Hole

^○Yusuke Morita¹, Hideto Tanoue¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Saleh Abusuilik⁴ (Toyohashi Univ. Technol.¹, Itoh Optical Ind. Co., Ltd.², Onward Ceramic Coating Co., Ltd.³, Hitachi Tool Eng., Ltd.⁴)

[28a-A6-7] △Uniform Coating of Hydrogen-Free DLC Film on Si Wafer and its Micro-Fabrication

^○Michinari Hosoo¹, Hideto Tanoue¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Takahiro Kawashima¹, Takayuki Shibata¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Abusuilik Saleh⁴, Nobuhiro Tsuji³ (Toyohashi Univ. of Technol.¹, Itoh Opt. Ind. Co., Ltd.², Onward Ceramic Coating Co., Ltd.³, Hitachi Tool Eng., Ltd.⁴)

[28a-A6-8] TDS Analysis of Hydrogenated DLC (ta-C:H and a-C:H) films

^○Hideto Tanoue¹, Tomoaki Kadoguchi¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Mobuhiro Tsuji³, Saleh Abusuilik⁴ (Toyohashi Univ. Technol.¹, Itoh Opt. Ind. Co., Ltd.², Onward Ceramic Coating Co., Ltd.³, Hitachi Tool Eng. Co., Ltd.⁴)

[28a-A6-9] Surface modification using oxygen plasma for DLC coatings with different cytophilic property

^○（B）Haruna Tada¹, Yousuke Kimura¹, Mai Hibino¹, Masanori Hiratsuka², Hideki Nakamori², Alanazi Ali⁴, Takumi Moriyama³, Masayuki Sakurai³, Hidetoshi Saitoh⁵, Naoki Fukata⁶, Yasuharu Ohgoe¹, Nataliya Nabatova-Gabain³, Kenji Hirakuri¹, Yasuhiro Fukui¹ (Tokyo Denki University¹, NANOTEC Co.², HORIBA ,Ltd³, King Saud University⁴, Nagaoka University of Technology⁵, National Institute for Materials Science⁶)

[28a-A6-10] Hemocompatibility for DLC film for blood analysis devices

^○（B）Keisuke Shiba¹, Satoshi Murata¹, Jun Mizuno², Ozeki Kazuhide³, Ohgoe Yasuharu⁴, Hirakuri Kenji¹, Alanazi Ali⁶, Keisuke Sato⁵, Naoki Hukata⁵, Shuichi Shoji² (School of Engineering and Graduate School of Engineering, Tokyo Denki Univ.¹, Major in Nano-Science and Nano-Engineering, Waseda Univ.², Mechanical-Engineering, Ibaraki Univ.³, Graduate School of Science and Engineering, Tokyo Denki Univ.⁴, International Center of Materials Nanoarchitectonics (MANA)⁵, King Saud Univ.⁶)

Session information

[28a-A6-1~10] 6.2 Carbon-based thin films