^○Hayato Noma¹, Jyunji Sakamoto¹, Hiroaki Kawata¹, Masaaki Yasuda¹, Yoshihiko Ｈｉｒａｉ¹ (osaka prefecture univ¹)

^○Atsushi Yokoo^1,2, Gediminas Dauderis¹, Makoto Fukuda³, Masaya Notomi^1,2 (NTT-NPC, NTT Corp.¹, NTT-BRL, NTT Corp.², Hirosaki Univ.³)

^○Harutaka Mekaru¹, Chieko Okuyama¹, Akihisa Ueno² (AIST¹, Nano Craft Technologies²)

^○（B）Naoki Ikutame¹, Hiroshi Ikeda¹, Daisuke Sakai², Kenji Harada², Junji Nishii¹ (Hokkaido Univ.¹, Kitame Inst. of Tech.²)

^○Makoto Okada¹, Emi Nishioka², Mizuho Kondo², Tomoyuki Sasaki³, Yuichi Haruyama¹, Hiroshi Ono³, Nobuhiro Kawatsuki², Shinji Matsui¹ (Laboratory of Advanced Science and Technology for Industry (LASTI), Univ. of Hyogo¹, Department of Materials Science and Chemistry, Graduate School of Engineering, Univ. of Hyogo², Department of Electrical Engineering, Nagaoka Univ. of Technology³)

^○Hitomi Wakaba^1,2, Makoto Okada^1,2, Syuso Iyoshi^1,2, Yuichi Haruyama^1,2, Shinji Matsui^1,2 (Univ.of Hyogo¹, JST-CREST²)

^○Takashi Yanagishita^1,2, Kazuyuki Nishio^1,2, Hideki Masuda^1,2 (Tokyo Metropolitan Univ.¹, KAST²)

^○Naoya Inoue¹, Geng Tan¹, Hideo Oi², Masahiro Mita², Norimichi Okuda³, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Inst. of Tech.¹, Kyodo International Inc.², SCIVAX Corp.³)

^○Harutaka Mekaru^1,2, Akihiro Ohtomo^1,3, Hideki Takagi^1,2, Mitsunori Kokubo^1,3, Hiroshi Goto^1,3 (BEANS Project¹, AIST², Toshiba Machine³)

^○Tomoki Nishino^1,2, Honoka Fujita¹, Hiroaki Kawata^1,2, Yoshihiko Hirai^1,2 (Osaka Pref. Univ¹, JST-CREST²)

^○Harutaka Mekaru¹, Hiroshi Hiroshima¹ (AIST¹)

^○Shu Kaneko¹, Masaru Nakagawa^1,2 (IMRAM, Tohoku Univ.¹, JST-CREST²)

^○Kenta Suzuki^1,2,3, Sung-Won Youn^2,3, Qing Wang^2,3, Hiroshi Hiroshima^2,3, Yasushiro Nishioka¹ (Nihon Univ.¹, AIST², JST-CREST³)

^○Shuso Iyoshi^1,2, Makoto Okada^1,2, Yuichi Haruyama^1,2, Shinji Matsui^1,2, Masaru Nakagawa^2,3, Hiroshi Hiroshima^2,4 (Univ. of Hyogo¹, JST-CREST², Tohoku Univ.³, AIST⁴)

^○（B）Takahiro Oyama^1,3, Makoto Okada^1,3, Shuso Iyoshi^1,3, Yuichi Haruyama^1,3, Hiroto Miyake², Tomoya Mizuta², Shinji Matsui^1,3 (Univ. of Hyogo¹, Daicel², JST-CREST³)

^○Takahiro Shiotus^1,2, Naoki Nishikura^1,2, Masaaki Yasuda^1,2, Hiroaki Kawata^1,2, Yoshihiko Hirai^1,2 (Osaka Pref. Univ.¹, JST-CREST²)

^○Kazuhiro Tada¹, Eiji Takada¹, Kohei Tomohiro², Kazuo Fujii¹, Yota Masuyama¹, Yoshihiko Hirai² (Toyama National Coll. Technol.¹, Osaka Pref. Univ.²)

^○Hiroyuki Tambo¹, Takashi Daimon², Tatsunori Kakuda¹, Yoshiyuki Yokoyama¹, Yuichi Sakai¹, Tomoaki Futakuchi¹ (TITC¹, HDK²)

^○（M1）Takuya Kitagawa¹, Hiroaki Kawata¹, Yoshihiko Hirai¹ (Osaka Prefecture University¹)

^○Hiroyuki Yoshinaga¹, Masaki Yanagisawa¹, Toshimitsu Kaneko¹, Kan Akiyama², Mikio Tajima², Daisei Shoji², Takuya Fujii², Hajime Shoji¹ (Sumitomo Electric Industries, Ltd.¹, Sumitomo Electric Device Innovations, Inc.²)