○Yoshihiro Kubota1, Yuji Tobisaka1, Shoji Akiyama1, Takeshi Suwa1, Kazutoshi Nagata1, Shigeru Konishi1, Makoto Kawai1 (Shin-Etsu Chemical Co.1)
Session information
Symposium(Oral presentation)
Symposium » ・Frontiers of process technology for Si-related thin films
[29p-B8-1~10] Frontiers of process technology for Si-related thin films
Fri. Mar 29, 2013 1:30 PM - 5:45 PM B8 (K2 4F-1406)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
○Noritaka Usami1 (IMR, Tohoku Univ.1)
○Tatsuya Shimoda1,2,3, Takashi Masuda1.2, Yasuo Matsuki2,4 (JAIST1, JST-ERATO2, JST-ALCA3, JSR4)
○Taizoh Sadoh1, Jong-Hyeok Park1,2, Masashi Kurosawa1,2, Kaoru Toko1,3, Masanobu Miyao1 (Kyushu Univ.1, JSPS2, Univ. Tsukuba3)
○Akito Hara1, Kuninori Kitahara2 (Tohoku Gakuin Univ.1, Shimane Univ.2)
○wenchang yeh1 (Shimane Univ.1)
○Shohei Hayashi1,2, Yuji Fujita1, Seiji Morisaki1, Takahiro Kamikura1, Muneki Akazawa1, Kohei Sakaike1, Seiichiro Higashi1 (Hiroshima Univ.1, JSPS Research Fellow DC2)
○Takuma Nishinohara1, Satoshi Chinen1, Tatsuya Okada1, Takashi Noguchi1 (Univ. of the Ryukyus1)
○Masashi Kurosawa1,2, Noriyuki Taoka1, Osamu Nakatsuka1, Hiroshi Ikenoue3, Shigeaki Zaima1 (Nagoya Univ.1, JSPS2, Kyushu Univ.3)
○Akira Heya1, Takuto Fukuoka1, Naoto Matsuo1, Kazuhiro Kanda2, Takashi Noguchi3 (Dept. Mat. Sci. and Chem. Univ. of Hyogo1, LASTI Univ. of Hyogo2, The Univ. of Ryukyu3)