[27a-A2-1~9] 3.4 Optical measurement

[27a-A2-2] △Monitoring of Metal Particle Shapes by a Waveguide-Mode Sensor at an Early Stage of Plating

^○（M2）Seigo Mizuno¹, Yoshimichi Ohki¹, Makoto Fujimaki², Koichi Awazu² (Waseda Univ.¹, AIST²)

Keywords:メッキ、センサー