[27a-A6-1~11] 6.2 Carbon-based thin films

[27a-A6-11] Vacuum Power Switch with Negative Electron Affinity of Diamond (3)

^○Daisuke Takeuchi^1,3,4, Satoshi Koizumi^2,3,4, Toshiharu Makino^1,3,4, Hiromitsu Kato^1,3,4, Masahiko Ogura^1,3,4, Hideyo Okushi^1,3,4, Hiromichi Ohashi^1,3,4, Satoshi Yamasaki^1,3,4 (AIST, ETRI¹, NIMS², ALCA, JST³, CREST, JST⁴)

Keywords:真空パワースイッチ、ダイヤモンド、負性電子親和力