The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[27a-A6-1~11] 6.2 Carbon-based thin films

Wed. Mar 27, 2013 9:00 AM - 12:00 PM A6 (K1 3F-305)

[27a-A6-2] Carrier Transport Properties of Non-degenerate Heavily-Boron-Doped Single-crystalline CVD Diamond Thin Layers Stacked Using Microwave Plasma Processes

○Tomohiro Kuki1, Osamu Maida1, Toshimichi Ito1 (Graduate School of Eng., Osaka Univ.1)

Keywords:ホウ素ドープダイヤモンド