[27a-A6-1~11] 6.2 Carbon-based thin films

[27a-A6-5] △Al-first AlN Growth on Diamond by Molecular Beam Epitaxy

^○Wako Ono¹, Yuki Yokoyama¹, Ryusuke Kanomata¹, Daiki Utsunomiya¹, Tomohiro Hakamata¹, Atsushi Hiraiwa¹, Hiroshi Kawarada¹ (Waseda Univ.¹)

Keywords:ダイヤモンド、AlN、MBE