[27a-A6-1~11] 6.2 Carbon-based thin films

[27a-A6-4] ▲Electronic band structures of Al₂O₃ and HfO₂ deposited by atomic layer deposition technique on hydrogenated diamond

^○Jiangwei Liu¹, Meiyong Liao¹, Masataka Imura¹, Yasuo Koide^1,2,3 (Optical and Electronic Materials Unit, NIMS¹, Nanofabrication Platform, NIMS², Center of Materials Research for Low Carbon Emission,NIMS³)

Keywords:diamond