[27a-F1-1~9] 6.5 Surface physics and vacuum

[27a-F1-1] Investigation of the difference between thermal oxidation and supersonic molecular beam induced oxidation on Si(113)

^○Shinya Ohno¹, Abe Sosuke¹, Rui Kanemura¹, Shu Miura¹, Takuma Narishige¹, Kei Inoue¹, Tatsuya Momose¹, Akitaka Yoshigoe², Yuden Teraoka², Shoichi Ogata^1,3, Tetsuji Yasuda³, Masatoshi Tanaka¹ (Yokohama Nat'l Univ.¹, JAEA², AIST³)

Keywords:シリコン、酸化、超音速分子線