[27a-G12-1~11] 17.2 Structural control and process

[27a-G12-6] △Study of electrochemical etching condition for suspended graphene fabrication

^○（D）Ryong-Sok O^1,2, Makoto Takamura¹, Kazuaki Furukawa¹, Masao Nagase², Hiroki Hibino¹ (NTT Basic Research Labs.¹, Tokushima Univ.²)

Keywords:グラフェン、エッチング