[27a-G21-1~8] 15.4 III-V-group nitride crystals

[27a-G21-3] Fabrication and Characterization of High-Quality-Factor (Q~4800) Vertical Microcavities with High-Quality Free-Standing (1-100) AlGaN Thin Films

^○Munetaka Arita¹, Renchun Tao², Satoshi Kako², Yasuhiko Arakawa^1,2 (NanoQuine, Univ.of Tokyo¹, IIS, Univ. of Tokyo²)

Keywords:垂直微小共振器、自立薄膜