[27a-G5-1~7] Objective and current status of CZTS solar cells

[27a-G5-5] Fabrication of CZTS thin films by sputtering with CZTS compound target

^○Ryota Nakamura¹, Kunihiko Tanaka¹, Hisao Uchiki¹, Kazuo Jimbo², Tsukasa Washio^2,3, Hironori Katagiri^2,3 (Nagaoka Univ. of Tech.¹, Nagaoka Nat. College of Tech.², JST-CREST³)

Keywords:CZTS、Cu2ZnSnS4、スパッタ