[27a-PA1-1~6] 1.1 Applied physics in general

[27a-PA1-3] Raman spectroscopy analysis and obsevation of deep ultraviolet damaged ta-C film

^○Tomomi Kozu^1,2, Makoto Yamaguchi^3,4, Masayuki Fujitsuka³, Shigeru Ueno³, Masahiro Kawaguchi⁵, Ken Nishida², Hiromi Shima², Takashi Yamamoto², Yasunori Furukawa⁶ (Renishaw¹, NDA², JSPMI³, TUAT⁴, TIRI⁵, Oxide⁶)

Keywords:ラマン、ta-C、トライボロジー