[27a-PA2-1~2] 1.3 Novel technologies

[27a-PA2-2] Evaluation of characteristics for VO_x thin films prepared by MOD

^○Hiroyuki Kasai¹, Son Le¹, Takashi Tachiki¹, Takashi Uchida¹ (National Defense Academy¹)

Keywords:二酸化バナジウム、有機金属分解法、MOD