[27a-PB2-1~24] 6.3 Oxide-based electronics

[27a-PB2-16] Fabrication of NbO₂ Thin Films Using Solid Phase Crystallization

^○Shoichiro Nakao^1,2, Yasushi Hirose^1,2,3, Tomoteru Fukumura^1,2,3, Tetsuya Hasegawa^1,2,3 (KAST¹, CREST², Univ. of Tokyo³)

Keywords:シード層