[27a-PB3-1~7] 6.4 New thin-film materials

[27a-PB3-2] ▲Fabrication of BeO-ZnO alloy phase thin films

^○Thomas Peltier¹, Mikk Lippmaa², Ryota Takahashi² (University of Tokyo¹, ISSP²)

Keywords:BeO、ZnO、薄膜