[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-1] Evaluation of electronic and optical properties in oxide semiconductors (III)-Correlations between photoconductivity and thermal annealing conditions in IGZO films?

^○Tomoya Kishi¹, Aya Hino¹, Shinya Morita¹, Shuji Kosaka¹, Kazushi Hayashi¹, Toshihiro Kugimiya¹ (KOBE STEEL, LTD.¹)

Keywords:酸化物半導体、μ-PCD