[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-13] Fabrication of Ga-In-O films by molecular precursor method

^○Taihei Yasuno¹, Takuto Oda¹, Hiroki Nagai¹, Hiroki Hara¹, Mitsunobu Sato¹, Tohru Honda¹ (Kogakuin Univ.¹)

Keywords:透明電極、TCO