[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-17] Growth of MgxZn1-xO thin film using MeCp2Mg source by RPE-MOCVD

^○（B）Nobuaki Ohmura¹, Sanjay Mohanta², Atsushi Nakamura², Jiro Temmyo^1,2 (Shizuoka Univ.¹, Shizuoka Univ. Res.Inst.of Electronics²)

Keywords:RPE-MOCVD、MgZnO、MeCp2Mg