[27a-PB4-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[27a-PB4-25] Substrate dependence on crystal grain growth of Nb-doped TiO₂ thin film

^○Sota Inoue¹, Seiji Ichiyanagi¹, Shuhei Funaki¹, Yasuji Yamada¹ (Shimane Univ.¹)

Keywords:基板依存性