[27p-A2-1~14] 3.4 Optical measurement

[27p-A2-11] Inspection of metallization process by differential reflection spectral measurements at plasma edges

^○Teppei Onuki¹, Hiroki Kuwano² (Ibaraki Univ.¹, Tohoku Univ.²)

Keywords:配線膜、プラズマ端、反射分光