[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-12] Comparison among sticking probabilities of Cu, Sn, and Zn atoms in magnetron sputtering deposition employing a CZTS target

^○Shunya Kikuchi¹, Koichi Sasaki¹ (Hokkaido Univ.¹)

Keywords:CZTS、スパッタリング、成膜