[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-7] ▲Deposition of highly conducting Cu thin film on polyimide substrate using RF-driven atmospheric pressure plasma jet in nitrogen atmosphere

^○Peng Zhao¹, Wei Zheng², Masaaki Nagatsu¹ (Shizuoka Univ.¹, Yazaki Corp.²)

Keywords:プラズマジェット、銅薄膜、ポリイミド