The 60th JSAP Spring Meeting,2013

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Regular sessions(Poster presentation with short presentation)

17. Nanocarbon Technology » 17. Nanocarbon Technology

[27p-G12-1~48] 17. Nanocarbon Technology

Wed. Mar 27, 2013 1:30 PM - 3:06 PM G12 (B5 2F-2206)

[27p-G12-7] △Effect of H2 flow rate on CH4-CVD growth of monolayer graphene

○junlei qi1,2, kosuke nagashio1, tomonori nishimura1, akira toriumi1 (Univ. Tokyo1, Harbin Institute of Technology2)

Keywords:CVD、H2