[27p-G12-1~48] 17. Nanocarbon Technology

[27p-G12-7] △Effect of H2 flow rate on CH4-CVD growth of monolayer graphene

^○junlei qi^1,2, kosuke nagashio¹, tomonori nishimura¹, akira toriumi¹ (Univ. Tokyo¹, Harbin Institute of Technology²)

Keywords:CVD、H2