[27p-G21-1~18] 15.4 III-V-group nitride crystals

[27p-G21-11] The island density of annealed LT-AlN layers and a crystalline quality of GaN films

^○Koji Okuno^1,2, Takahide Oshio², Naoki Shibata², Yoshio Honda¹, Masahito Yamaguchi¹, Shigeyasu Tanaka¹, Hiroshi Amano¹ (Nagoya Univ.¹, Toyoda Gosei²)

Keywords:AlN buffer、GaN、island density